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Best price/performance ratio in the marketplace Ideal for OEM use Hybrid design using passive isolation back up system Ideal for system retrofit, where passive isolation is not
sufficient Robust technology Operates without air Available in workstations and small tabletop units
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ETC Series /
Isolation Modules / Technical Specifications
 transient
settling time |
<100 msec |
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force output per actuator |
depending on the selected force actuator |
| degrees
of freedom (D.O.F.) |
3 standard / 6 optional |
| system
noise floor |
100 nm / VHz at 0.1 Hz; 10 nm / VHz at 1 Hz; 1 nm / VHz at 10 Hz;
<1nm / VHz for f>10 Hz
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| maximum
deflection | ± 1 mm (0.03 in.) |
| vertical
leveling
accuracy | ± 10 µm |
| EMI
emission | <5 mG / VHz
(P-P) standard
<0.1 mG / VHz
(P-P) optimal |
| power
consumption (max.) | 1.2 kW |
| power
consumption (typ.) | 0.35 kW |
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Products