| |
Active, electronic vibration control in six degrees-of-freedom Optimal vibration isolation from 0.1 Hz and above Adaptive, self-tuning control algorithm Minimal settling time after transient excitation Feed forward feature for onboard inertial force cancellation Digital control based upon DSP-CPU
|
|
TCN Series /
Isolation Modules / Technical Specifications
 transient
settling time |
<50 msec |
|
force output per actuator |
depending on linear force motor |
| degrees
of freedom (D.O.F.) |
6 |
| system
noise floor |
100 nm / VHz at 0.1 Hz; 10 nm / VHz at 1 Hz; 1 nm / VHz at 10 Hz;
<1nm / VHz for f>10 Hz
|
| maximum
deflection | ± 1 mm (0.03 in.) |
| vertical
leveling
accuracy | ± 300 µm (MV-3 valves) |
| EMI
emission | <5 mG / VHz
(P-P) |
| air
supply (min./max.) | 5/8 bar (75/120 psi) |
| air
consumption | <100 Nltr./min; > 1 scfm |
| power
consumption (max.) | 0.85 kW |
| power
consumption (typ.) | 0.4 kW |
|
Products