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Laser Measurement system with a resolution of .0003 µm Class 1 compatible FED-STD-209E Low cost optical encoders with resolution to 0.1 µm Dampened hard stops Optional vacuum compatibility Linear motor and cross roller bearings Optical limit switches
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AMB-200/300 / Motion Control Modules / Technical Specifications
 straightness of travel |
0.01 µm/mm |
| flatness |
0.01 µm/mm |
| resolution |
0.1 µm / with glass scale encoder |
| repeatability |
75 nm w/o. temp. control
10 nm w/o. temp. control
5 nm in a vacuum |
| resonance frequency |
> 196 Hz for AMB-200
> 175 Hz for AMB-300 |
| max.
velocity |
up to 1 mm/sec (feedback dependent) |
| max.
acceleration | 1.0 g's (load dependent) |
| power
requirements | 3 Amps per phase |
| electrical
connection |
15 pin male Dsub connector |
| outside
dimensions |
900 x 705 x 200 mm (35.5 x27.7 x 7.9 in.) |
| max.
payload |
15 kg (33 lbs.) |
| module
weight |
28 kg (62 lbs.) |
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