Stages

Precision Motion Control Modules
Motion control modules are designed to handle samples, in particular wafers and reticles. Since different applications require different specification profiles, IDE's product portfolio has been designed to address a wide range of demanding applications. As the lower-cost SMB-Series from IDE addresses many less demanding motion control issues, the advanced air bearing stage type HAS provides a highly demanding precision performance that is unparalleled in the industry.

Since the overall stability, resolution and throughput of each machine depends on the precise combination of motion control components with a solid mechanical structure and the vibration isolation system, advanced development product development groups now have the opportunity to benefit from the combined talents at IDE, a team that offers the most advanced technology and custom-design capabilities from a single source.