FOS 300 BOLTS Compatible FOUP Opening Load port

• BOLTS compatible 300 mm FOUP loader

• SEMI and CE certified

• Fast load/unload time

• High reliability

• Small footprint

FOS 300 / Technical Specifications

dimensions H x W x D	1370 x 470 x 540 mm
loading height	900 ± 10 mm
PWP	10-5 particles/cm2/pass
cycle time	11 seconds
FOUP clamping / unclamping	1 second / 1 second
positioning accuracy	0.5 mm
door opening torque	2 Nm
FOUP docking movement	70 mm
power supply	24 VDC
compressed air requirements	5 bar (75 psi) @ 1 Nltr/min
vacuum requirements	40 kPa (6 psi) @ 1 Nltr/min
MCBF / MTTR	500,000 cycles / 30 minutes
FOUP mounting	motorized
standard compliance	SEMI E 19, SEMI E 15.1, SEMI E 47.1, SEMI E 75, SEMI E 62/ 63/ 64, SEMI S2-0200, SEMI S8-95, CE