EMI

Electromagnetic Stray Field Management
 

Problems/Issues:
High-resolution electron microscopes (SEM/TEM) and focused ion beam systems (FIB) are especially sensitive to environmental stray fields. In the field, passive µ-metal shielding has proven ineffective and restricts accessibility to the control elements of the column.

Furthermore, µ-metal cannot provide attenuation at frequencies below 10 Hz. Effective reduction of stray fields is imperative for operation inside cleanrooms and next to elevators and electric train lines.

IDEAS:

IDE has succeeded in developing a history of continuously improving control systems, using its own sense-coil and proprietary fluxgate technology in conjunction with DSP-based embedded controllers and adaptive control algorithms allowing for attenuation of stray fields by as much as 60 dB for any frequency.

In fact, the rejection characteristics can be tailored by IDE to the unique sensitivity needs of each microscope and each site. High resolution down to 1 nm has been proven for FE-SEM in environments with up to 150 mG peak-to-peak fields.